Effect of substrate temperature on the structure and the metal insulator transition in pulsed laser deposed V02\ films on soda lime glass

摘要

In this paper, we report the effect of soda lime substrate deposition temperature (Ts) on the crystal structure andthe metal insulator transition of VO2 thin films. Samples were deposited at substrate deposition temperatureranging from 450 to 600 0C by pulsed-laser deposition and characterized by x-ray diffraction and UV-VISspectrophotometer. At a substrate temperature of 550°C, the VO2 (100) reflection dominate the spectrumshowing a change in crystalline grains orientation. The highest transition temperatures of 74 oC with the lowesthysteresis width of 11 oC were obtained on the same sample grown at a substrate deposition temperature of 500oC and also corresponding to the largest grains size of a value of 350 nm.